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17 March 2023 Unconventional epitaxy for fabricating deformable and heterogeneously integrated devices (Conference Presentation)
Young Joon Hong
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Proceedings Volume PC12441, Light-Emitting Devices, Materials, and Applications XXVII; PC1244109 (2023) https://doi.org/10.1117/12.2648639
Event: SPIE OPTO, 2023, San Francisco, California, United States
Abstract
Epitaxy is a way of growing single-crystalline thin film devices, initially driven by forming chemical bonds between wafer and epi-layer. Both chemical and physical vapor-phase epitaxy have contributed to manufacturing quantum-functional devices with composition-modulated ultrathin heterostructures. However, the strongly bonded epi-layer/wafer makes it difficult to fabricate highly free-form and multi-functionally integrated high-density devices unless the wafer is easily peeled off. In this talk, we introduce the unconventional epitaxy as a platform for fabricating deformable and densely stackable devices, and share the results of our recent works on van der Waals and remote epitaxy of gallium nitride microrod and thin films for deformable lighting devices and vertical lighting-pixel-stacks. We also discuss the opportunities and challenges of the novel epitaxy for future electronics and display technology.
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Young Joon Hong "Unconventional epitaxy for fabricating deformable and heterogeneously integrated devices (Conference Presentation)", Proc. SPIE PC12441, Light-Emitting Devices, Materials, and Applications XXVII, PC1244109 (17 March 2023); https://doi.org/10.1117/12.2648639
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KEYWORDS
Epitaxy
Semiconducting wafers
Display technology
Electronics
Interfaces
Thin film devices
Thin films
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