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5 March 2022 Out of the blue: UV VCSELs
Åsa Haglund, Filip Hjort, Johannes Enslin, Michael A. Bergmann, Munise Cobet, Giulia Cardinali, Nando Prokop, Lars Persson, Tim Kolbe, Johan Gustavsson, Joachim Ciers, Tim Wernicke, Michael Kneissl
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Proceedings Volume PC12001, Gallium Nitride Materials and Devices XVII; PC120010F (2022) https://doi.org/10.1117/12.2612378
Event: SPIE OPTO, 2022, San Francisco, California, United States
Abstract
In recent years, there has been tremendous improvement in the performance of blue-emitting vertical-cavity surface-emitting lasers (VCSELs) and they are now on the cusp of commercialization. We will summarize state-of-the-art results and outline the main challenges in extending the emission wavelength into the ultraviolet (UV). Our method to simultaneously achieve high-reflectivity mirrors and good cavity length control by selective electrochemical etching has been essential to demonstrate the world’s first UV-B VCSEL. The use of dielectric mirrors, where one material has a negative thermo-optical coefficient, counteracts the inherent red-shift of the resonance wavelength, enabling a temperature-stable emission.
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Åsa Haglund, Filip Hjort, Johannes Enslin, Michael A. Bergmann, Munise Cobet, Giulia Cardinali, Nando Prokop, Lars Persson, Tim Kolbe, Johan Gustavsson, Joachim Ciers, Tim Wernicke, and Michael Kneissl "Out of the blue: UV VCSELs", Proc. SPIE PC12001, Gallium Nitride Materials and Devices XVII, PC120010F (5 March 2022); https://doi.org/10.1117/12.2612378
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KEYWORDS
Vertical cavity surface emitting lasers
Ultraviolet radiation
Dielectric mirrors
Electrochemical etching
Mirrors
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