1Argonne National Lab. (United States) 2Northern Illinois Univ. (United States) 3Technological Institute of Superhard and New Carbon Materials (Russian Federation)
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Ultra-thin (< 100 um) diamond single crystals are essential for the realization of numerous next generation x-ray optical devices. Fabrication and handling of such ultra-thin crystal components without introducing damage and strain is a challenge. Drumhead crystals, monolithic crystal structures comprised of a thin membrane furnished with a surrounding solid collar would be a solution for the proper handling ensuring mechanically stable and strain-free mount of the membranes with efficient thermal transport. However, diamond being one of the hardest and chemically inert materials poses insurmountable difficulties in the fabrication. Here we report on a successful manufacturing of the diamond drumhead crystals using picosecond laser milling. Subsequent temperature treatment appears to be crucial for the membranes to become defect-free and unstrained, as revealed by x-ray double-crystal topography on an example of drumhead crystals with 1-mm in diameter and 28 um to 47 um-thick membranes in the (100) orientation.
Tomasz Kolodziej,Preeti Vodnala,Sergey A. Terentyev,Vladimir D. Blank, andYuri V. Shvyd'ko
"Diamond drumhead crystals
(Conference Presentation)", Proc. SPIE 9963, Advances in X-Ray/EUV Optics and Components XI, 99630C (2 November 2016); https://doi.org/10.1117/12.2238013
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Tomasz Kolodziej, Preeti Vodnala, Sergey A. Terentyev, Vladimir D. Blank, Yuri V. Shvyd'ko, "Diamond drumhead crystals
(Conference Presentation)," Proc. SPIE 9963, Advances in X-Ray/EUV Optics and Components XI, 99630C (2 November 2016); https://doi.org/10.1117/12.2238013