Extended-range AFM imaging for applications to reflectance modeling

Brian G. Hoover; Pablo A. Reyes

doi:10.1117/12.2237329

27 September 2016 Extended-range AFM imaging for applications to reflectance modeling

Brian G. Hoover, Pablo A. Reyes

Proceedings Volume 9961, Reflection, Scattering, and Diffraction from Surfaces V; 99610R (2016) https://doi.org/10.1117/12.2237329
Event: SPIE Optical Engineering + Applications, 2016, San Diego, California, United States

Abstract

A technique employing a 3D morphological image-registration algorithm is demonstrated for stitching together high-resolution surface im- ages obtained with a commercial atomic-force microscope (AFM), producing 3D surface images up to 1mm long with lateral resolution ~ 100nm: These images can be applied to reflectance modeling by extracting surface parameters to be used as inputs for reflectance models, for instance the previously-published Coherence Model [BG. Hoover and VL. Gamiz, J. Opt. Soc. Am. A 23, 314 (2006)], which utilizes the surface roughness and autocorrelation derivatives in the large-roughness approximation. Surface moments estimated from extended-range AFM images demonstrate lower uncertainty at all frequencies and substantial reduction of sampling artifacts at low frequencies, enabling improved estimates of surface parameters. The autocorrelation of a nearly monoscale diffuse-gold surface is measured out to 800μm separation, and the autocorrelation of a multiscale tin surface provides parameters that verify the Coherence Model t to the measured quasimonostatic BRDF.

Conference Presentation

Citation Download Citation

Brian G. Hoover and Pablo A. Reyes "Extended-range AFM imaging for applications to reflectance modeling", Proc. SPIE 9961, Reflection, Scattering, and Diffraction from Surfaces V, 99610R (27 September 2016); https://doi.org/10.1117/12.2237329

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