Testing optical surfaces using two-frame phase-shifting interferometry

Chao Tian; Shengchun Liu

doi:10.1117/12.2238323

28 August 2016 Testing optical surfaces using two-frame phase-shifting interferometry

Chao Tian, Shengchun Liu

Proceedings Volume 9960, Interferometry XVIII; 996017 (2016) https://doi.org/10.1117/12.2238323
Event: SPIE Optical Engineering + Applications, 2016, San Diego, California, United States

Abstract

Standard phase-shifting interferometry (PSI) generally requires collecting at least three phase-shifted interferograms to extract the physical quantity being measured. Here, we propose a simple two-frame PSI for the testing of a range of optical surfaces, including flats, spheres, and aspheres. The two-frame PSI extracts modulated phase from two randomly phase-shifted interferograms using a Gram-Schmidt algorithm, and can work in either null testing or non-null testing modes. Experimental results of a paraboloidal mirror suggest that the two-frame PSI can achieve comparable measurement precision with conventional multi-frame PSI, but has the advantages of faster data acquisition speed and less stringent hardware requirements. It effectively expands the flexibility of conventional PSI and holds great potential in many applications.

Citation Download Citation

Chao Tian and Shengchun Liu "Testing optical surfaces using two-frame phase-shifting interferometry", Proc. SPIE 9960, Interferometry XVIII, 996017 (28 August 2016); https://doi.org/10.1117/12.2238323

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KEYWORDS

Mirrors

Optical testing

Phase interferometry

Calibration

Demodulation

Phase shifts

Charge-coupled devices

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