Holographic vector-wave femtosecond laser processing

Yoshio Hayasaki; Satoshi Hasegawa

doi:10.1117/12.2208311

4 March 2016 Holographic vector-wave femtosecond laser processing

Yoshio Hayasaki, Satoshi Hasegawa

Proceedings Volume 9764, Complex Light and Optical Forces X; 97641C (2016) https://doi.org/10.1117/12.2208311
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

Arbitrary and variable beam shaping of femtosecond pulses by a computer-generated hologram (CGH) displayed on a spatial light modulator (SLM) have been applied to femtosecond laser processing. The holographic femtosecond laser processing has been widely used in many applications such as two-photon polymerization, optical waveguide fabrication, fabrication of volume phase gratings in polymers, and surface nanostructuring. A vector wave that has a spatial distribution of polarization states control of femtosecond pulses gives good performances for the femtosecond laser processing. In this paper, an in- system optimization of a CGH for massively-parallel femtosecond laser processing, a dynamic control of spatial spectral dispersion to improve the focal spot shape, and the holographic vector-wave femtosecond laser processing are demonstrated.

Citation Download Citation

Yoshio Hayasaki and Satoshi Hasegawa "Holographic vector-wave femtosecond laser processing", Proc. SPIE 9764, Complex Light and Optical Forces X, 97641C (4 March 2016); https://doi.org/10.1117/12.2208311

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KEYWORDS

Computer generated holography

Polarization

Holography

Diffraction

Laser processing

Nanolithography

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