Optically pumped 1550nm wavelength tunable MEMS VCSEL

Hitesh K. Sahoo; Thor Ansbæk; Luisa Ottaviano; Elizaveta S. Semenova; Ole Hansen; Kresten Yvind

doi:10.1117/12.2209563

15 March 2016 Optically pumped 1550nm wavelength tunable MEMS VCSEL

Hitesh K. Sahoo, Thor Ansbæk, Luisa Ottaviano, Elizaveta S. Semenova, Ole Hansen, Kresten Yvind

Proceedings Volume 9760, MOEMS and Miniaturized Systems XV; 97600X (2016) https://doi.org/10.1117/12.2209563
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

The paper presents the design and fabrication of an optically pumped 1550nm tunable MEMS VCSEL with an enclosed MEMS. The MEMS is defined in SOI and the active material, an InP wafer with quantum wells are bonded to the SOI and the last mirror is made from the deposition of dielectric materials. The design brings in flexibility to fabricate MEMS VCSELs over a wider range of wavelengths. The paper discusses results from the simulations and bonding results from fabrication. The device will push the boundaries for wavelength sweep speed and bandwidth.

Citation Download Citation

Hitesh K. Sahoo, Thor Ansbæk, Luisa Ottaviano, Elizaveta S. Semenova, Ole Hansen, and Kresten Yvind "Optically pumped 1550nm wavelength tunable MEMS VCSEL", Proc. SPIE 9760, MOEMS and Miniaturized Systems XV, 97600X (15 March 2016); https://doi.org/10.1117/12.2209563

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