SiO2-glass drilling by short-pulse CO2 laser with controllable pulse-tail energy

Kazuyuki Uno; Takuya Yamamoto; Miyu Watanabe; Tetsuya Akitsu; Takahisa Jitsuno

doi:10.1117/12.2211565

14 March 2016 SiO₂-glass drilling by short-pulse CO₂ laser with controllable pulse-tail energy

Kazuyuki Uno, Takuya Yamamoto, Miyu Watanabe, Tetsuya Akitsu, Takahisa Jitsuno

Proceedings Volume 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI; 973519 (2016) https://doi.org/10.1117/12.2211565
Event: SPIE LASE, 2016, San Francisco, California, United States

Abstract

We developed a longitudinally excited CO2 laser that produces a short laser pulse with the almost same spike-pulse energy of about 0.8 mJ and the controllable pulse-tail energy of 6.33−23.08 mJ. The laser was very simple and consisted of a 45-cm-long alumina ceramic pipe with an inner diameter of 9 mm, a pulse power supply, a step-up transformer, a storage capacitance and a spark-gap switch. The dependence of SiO₂ glass drilling on the fluence and the number was investigated by four types of short-pulse CO₂ lasers. In this work, the effective short laser pulse with the spike pulse energy of 0.8 mJ for SiO₂ glass drilling was the laser pulse with the pulse tail energy of 19.88 mJ, and produces the drilling depth per the fluence of 124 μm/J/cm².

Citation Download Citation

Kazuyuki Uno, Takuya Yamamoto, Miyu Watanabe, Tetsuya Akitsu, and Takahisa Jitsuno "SiO₂-glass drilling by short-pulse CO₂ laser with controllable pulse-tail energy", Proc. SPIE 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI, 973519 (14 March 2016); https://doi.org/10.1117/12.2211565

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