Evaluation of figure accuracy of Wolter mirror fabricated by electroforming

Satoru Egawa; Takehiro Kume; Yoko Takeo; Yoshinori Takei; Hiroto Motoyama; Hidekazu Mimura

doi:10.1117/12.2243422

25 October 2016 Evaluation of figure accuracy of Wolter mirror fabricated by electroforming

Satoru Egawa, Takehiro Kume, Yoko Takeo, Yoshinori Takei, Hiroto Motoyama, Hidekazu Mimura

Proceedings Volume 9687, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics; 968705 (2016) https://doi.org/10.1117/12.2243422
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

The Wolter mirror is a promising imaging device for soft x-ray microscopy owing to its excellent characteristics. Its annular aperture enables high-NA design while maintaining high photon transfer efficiency. However, its deep and narrow cylinder-like shape makes its fabrication difficult. Despite its long history, the Wolter mirror has not been practically used for high-resolution microscopy. We have been developing a fabrication process for grazing incidence mirrors with rotationally symmetric shapes. The mirrors are replicated from precisely machined mandrels. We employ electroforming as a replication method with high replication accuracy and reproductivity. Here, we report the first fabrication of a Wolter mirror and discuss the replication quality in electroforming. The imaging quality of Wolter mirror is also evaluated in an observation experiment using a visible-light microscope.

Citation Download Citation

Satoru Egawa, Takehiro Kume, Yoko Takeo, Yoshinori Takei, Hiroto Motoyama, and Hidekazu Mimura "Evaluation of figure accuracy of Wolter mirror fabricated by electroforming", Proc. SPIE 9687, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics, 968705 (25 October 2016); https://doi.org/10.1117/12.2243422

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KEYWORDS

Mirrors

Wavefronts

Microscopes

Nickel

Spatial frequencies

Magnetorheological finishing

Objectives

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