Study on machining deformation of the ultra-thin mirror

Hao Zhang; Peng Wang

doi:10.1117/12.2243317

28 October 2016 Study on machining deformation of the ultra-thin mirror

Hao Zhang, Peng Wang

Proceedings Volume 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 968318 (2016) https://doi.org/10.1117/12.2243317
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

In shape processing of the ultra-thin mirror, deformation will be produced under cutting forces, which is a major cause of quality deterioration. An ultra-thin mirror with diameter-thickness ratio more than 10 is studied in this paper. Rigidity characteristic of the grinding process by diamond wheel is analyzed by FEM. A receptance model of the micro-cutting process and the surface accuracy is established by a self-adaptive multi-scale method according the first strength method. And the effectiveness of the mathematical model is verified by experience. And the dynamic stiffness caused by grinding is optimized. As a result, deformation of the optical surface is reduced to 0.004λ and the acceptable surface accuracy can be achieved.

Citation Download Citation

Hao Zhang and Peng Wang "Study on machining deformation of the ultra-thin mirror", Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 968318 (28 October 2016); https://doi.org/10.1117/12.2243317

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available