Paper
15 October 2015 Implant-defined coherent hexagonal vertical cavity surface emitting laser array
Jun Wang, Chen Xu, Meng Xun, Jie Liu
Author Affiliations +
Proceedings Volume 9671, AOPC 2015: Advances in Laser Technology and Applications; 96710L (2015) https://doi.org/10.1117/12.2199180
Event: Applied Optics and Photonics China (AOPC2015), 2015, Beijing, China
Abstract
Hexagonal in-phase coherently coupled arrays of vertical cavity surface-emitting lasers (VCSELs) were fabricated using proton implantation. The arrays showed excellent beam quality with small far-field divergence angle.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jun Wang, Chen Xu, Meng Xun, and Jie Liu "Implant-defined coherent hexagonal vertical cavity surface emitting laser array", Proc. SPIE 9671, AOPC 2015: Advances in Laser Technology and Applications, 96710L (15 October 2015); https://doi.org/10.1117/12.2199180
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KEYWORDS
Vertical cavity surface emitting lasers

Near field

Etching

Optics manufacturing

Data storage

LIDAR

Light sources

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