A fully model-based MPC solution including VSB shot dose assignment and shape correction

Ingo Bork; Peter Buck; Murali Reddy; Bhardwaj Durvasula

doi:10.1117/12.2199157

23 October 2015 A fully model-based MPC solution including VSB shot dose assignment and shape correction

Ingo Bork, Peter Buck, Murali Reddy, Bhardwaj Durvasula

Proceedings Volume 9635, Photomask Technology 2015; 96350U (2015) https://doi.org/10.1117/12.2199157
Event: SPIE Photomask Technology, 2015, Monterey, California, United States

Abstract

The value of using multiple dose levels for individual shots on VSB (Variable Shaped Beam) mask writers has been demonstrated earlier [1][2]. The main advantage of modulating dose on a per shot basis is the fact that higher dose levels can be used selectively for critical features while other areas of the mask with non-critical feature types can be exposed at lower dose levels. This reduces the amount of backscattering and mask write time penalty compared to a global overdose-undersize approach.

While dose assignment to certain polygons or parts of polygons (VSB shots) can easily be accomplished via DRC rules on layers with limited shape variations like contact or VIA layers, it can be challenging to come up with consistent rules for layers consisting of a very broad range of shapes, generally found on metal layers.

This work introduces a method for fully model-based modulation of shot dose for VSB machines supporting between two and eight dose levels and demonstrates results achieved with this method.

Citation Download Citation

Ingo Bork, Peter Buck, Murali Reddy, and Bhardwaj Durvasula "A fully model-based MPC solution including VSB shot dose assignment and shape correction", Proc. SPIE 9635, Photomask Technology 2015, 96350U (23 October 2015); https://doi.org/10.1117/12.2199157

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available