New developments in the manufacture of large freeform surfaces with micro-structures

Jeff Roblee; Mark Walter; Ben Jacobs

doi:10.1117/12.2197281

11 October 2015 New developments in the manufacture of large freeform surfaces with micro-structures

Jeff Roblee, Mark Walter, Ben Jacobs

Proceedings Volume 9633, Optifab 2015; 96331C (2015) https://doi.org/10.1117/12.2197281
Event: SPIE Optifab, 2015, Rochester, New York, United States

Abstract

A new capability for simultaneously generating micro-structures and large freeform surfaces has been developed. Multiple axes of CNC coordinated motion have been integrated into an ultra precision machine platform, enabling a wide variety of optical mold masters to be created. Facilitated by a specially developed control system, freeform optical surfaces as large as 600 x 600 x 100 mm are possible. Some machine alignments are critical to the production of accurate parts and these will be discussed. A bridge construction reduces Abbe offsets, and oil hydrostatic linear slide ways provide sub-micron straightness. The linear axes are capable of accurate positioning by means of linear motors in combination with the non contact oil hydrostatic slide ways. Optical surface finishes are achieved with the stability of a large granite base supported by a high performance vibration isolation system. The machine includes a unique, self-compensating, patented oil bearing rotary axis. Critical machine errors are measured and corrected with integrated CNC machine compensation. The machine has accuracy and repeatability for the creation of precise, intersecting groove structures with multiple angles over large areas. Optical surfaces can be generated either by a ruling/shaping operation with a non-rotating tool, or by a flycutting tool rotating on a high speed air bearing spindle. The spindle can double as a positioning axis to generate variable angle grooves in ruling mode. A Fast Tool Servo can be utilized to create fine micro-structures. Work piece quality can be evaluated in-situ with metrology sensors.

Citation Download Citation

Jeff Roblee, Mark Walter, and Ben Jacobs "New developments in the manufacture of large freeform surfaces with micro-structures", Proc. SPIE 9633, Optifab 2015, 96331C (11 October 2015); https://doi.org/10.1117/12.2197281

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