Multilayer optics for coherent EUV/X-ray laser sources

F. Delmotte; M. Dehlinger; Ch. Bourassin-Bouchet; S. de Rossi; A. Jerome; E. Meltchakov; F. Varnière

doi:10.1117/12.2188048

22 September 2015 Multilayer optics for coherent EUV/X-ray laser sources

F. Delmotte, M. Dehlinger, Ch. Bourassin-Bouchet, S. de Rossi, A. Jerome, E. Meltchakov, F. Varnière

Proceedings Volume 9589, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XI; 958907 (2015) https://doi.org/10.1117/12.2188048
Event: SPIE Optical Engineering + Applications, 2015, San Diego, California, United States

Abstract

After a brief review of recent results achieved at Laboratoire Charles Fabry concerning high reflectivity mirrors, mirrors with enhanced spectral purity and broadband mirrors, we describe a new approach to design high efficiency multilayer mirrors for application on a broad spectral range. The main idea is to use 2 “spacer” materials (Aluminum and Scandium) in combination with a third material (Boron carbide or Silicon Carbide). We present several examples of design optimization using such multilayers. Finally, we show the first preliminary experimental results with Al/Sc/B4C and Al/Sc/SiC multilayers deposited by ion beam sputtering.

Citation Download Citation

F. Delmotte, M. Dehlinger, Ch. Bourassin-Bouchet, S. de Rossi, A. Jerome, E. Meltchakov, and F. Varnière "Multilayer optics for coherent EUV/X-ray laser sources", Proc. SPIE 9589, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XI, 958907 (22 September 2015); https://doi.org/10.1117/12.2188048

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