Study of hafina-silica mixed coatings with different compositions prepared by E-beam co-evaporation

Huanbin Xing; Meiping Zhu; Yingjie Chai; Feifei Tu; Hu Wang; Kui Yi; Jianda Shao

doi:10.1117/12.2185981

14 July 2015 Study of hafina-silica mixed coatings with different compositions prepared by E-beam co-evaporation

Huanbin Xing, Meiping Zhu, Yingjie Chai, Feifei Tu, Hu Wang, Kui Yi, Jianda Shao

Proceedings Volume 9532, Pacific Rim Laser Damage 2015: Optical Materials for High-Power Lasers; 953226 (2015) https://doi.org/10.1117/12.2185981
Event: Pacific Rim Laser Damage, 2015, Jiading, Shanghai, China

Abstract

Hafnia-silica (HfO₂/SiO₂) mixed thin films with a wide range of different compositions have been deposited on fused silica substrate by E-beam co-evaporation. The change in composition is achieved by changing the deposition rates of individual materials. The transmittance spectra are measured by the spectrometer, and then the refractive indexes are calculated with Essential Macleod. The vertical uniformity and grain structure of the films are analyzed by X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD), respectively. The experimental results demonstrate that the coatings have good uniformity, and all the films are amorphous except the pure HfO₂ film. In addition, the mixed coating with about 16.85% SiO₂ content has a higher refractive index than the pure HfO₂ coating.

Citation Download Citation

Huanbin Xing, Meiping Zhu, Yingjie Chai, Feifei Tu, Hu Wang, Kui Yi, and Jianda Shao "Study of hafina-silica mixed coatings with different compositions prepared by E-beam co-evaporation", Proc. SPIE 9532, Pacific Rim Laser Damage 2015: Optical Materials for High-Power Lasers, 953226 (14 July 2015); https://doi.org/10.1117/12.2185981

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