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Modeling Aspects in Optical Metrology V Sponsored by SPIE Cooperating Organisations European Optical Society German Scientific Laser Society (Wissenschaftliche Gesellschaft Lasertechnik e.V.) Published by SPIE Volume 9526 The papers included in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations may not be available for publication. The papers published in these proceedings reflect the work and thoughts of the authors and are published herein as submitted. The publisher is not responsible for the validity of the information or for any outcomes resulting from reliance thereon. Please use the following format to cite material from this book: Author(s), ‘Title of Paper,” in Modeling Aspects in Optical Metrology V, edited by Bernd Bodermann, Karsten Frenner, Richard M. Silver, Proceedings of SPIE Vol. 9526 (SPIE, Bellingham, WA, 2015) Article CID Number. ISSN: 0277-786X ISBN: 9781628416862 Published by SPIE P.O. Box 10, Bellingham, Washington 98227-0010 USA Telephone +1 360 676 3290 (Pacific Time) · Fax +1 360 647 1445 Copyright © 2015, Society of Photo-Optical Instrumentation Engineers. Copying of material in this book for internal or personal use, or for the internal or personal use of specific clients, beyond the fair use provisions granted by the U.S. Copyright Law is authorized by SPIE subject to payment of copying fees. The Transactional Reporting Service base fee for this volume is $18.00 per article (or portion thereof), which should be paid directly to the Copyright Clearance Center (CCC), 222 Rosewood Drive, Danvers, MA 01923. Payment may also be made electronically through CCC Online at copyright.com. Other copying for republication, resale, advertising or promotion, or any form of systematic or multiple reproduction of any material in this book is prohibited except with permission in writing from the publisher. The CCC fee code is 0277-786X/15/$18.00. Printed in the United States of America. Publication of record for individual papers is online in the SPIE Digital Library. Paper Numbering: Proceedings of SPIE follow an e-First publication model, with papers published first online and then in print. Papers are published as they are submitted and meet publication criteria. A unique citation identifier (CID) number is assigned to each article at the time of the first publication. Utilization of CIDs allows articles to be fully citable as soon as they are published online, and connects the same identifier to all online, print, and electronic versions of the publication. SPIE uses a six-digit CID article numbering system in which:
The CID Number appears on each page of the manuscript. The complete citation is used on the first page, and an abbreviated version on subsequent pages. AuthorsNumbers in the index correspond to the last two digits of the six-digit citation identifier (CID) article numbering system used in Proceedings of SPIE. The first four digits reflect the volume number. Base 36 numbering is employed for the last two digits and indicates the order of articles within the volume. Numbers start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B…0Z, followed by 10-1Z, 20-2Z, etc. Abbas, Mohammed, 0F Abdula, Polina A., 1N Agocs, E., 0S Ahmadi, Mohammad, 1Q Al-Hadhrami, Luai M., 0F Ao, Ming-Wu, 0C, 13 Bär, Markus, 0U Barnes, Bryan M., 0V Bäumer, S., 0O Beuth, Thorsten, 09, 0G Beverage, Jake, 10 Bittkau, Karsten, 0W Bodermann, Bernd, 0S, 0U Bräuer-Burchardt, Christian, 08 Campos, Juan, 11, 16, 1A Cao, Zhao, 0W Carius, Reinhard, 0W Casillas-Rodríguez, Francisco J., 12 Chelibanov, V. P., 0D Chen, Xiuguo, 17, 19 Cisotto, L., 07 de Groot, Peter, 10 Deutz, A., 0O Dong, Lizhi, 0C, 13 Endres, J., 0S Ermes, Markus, 0W Ershov, Alexandr G., 1B Estévez, Irene, 16, 1A Ezhova, Kseniia, 1E, 1I Fodor, B., 0S Fox, Maik, 09, 0G Freijo Martín, Idoia, 0A Frenner, Karsten, 0Z Fried, M., 0S Fries, T., 0R Fu, Liwei, 0Z Glebov, Victor, 1C Gross, Hermann, 0U Gruppetta, Stephen, 0X Gu, Honggang, 17, 19 Heidenreich, Sebastian, 0U Henn, Mark-Alexander, 0V Holzhüter, Hanno, 0I Houta, F., 0R Huke, Philipp, 0I Iemmi, Claudio, 11, 16 Ishanin, G. G., 0D Javadianvarjovi, Soheila, 1Q Jiang, Hao, 17, 19 Juhasz, G., 0S Kalkanjiev, Todor K., 16 Khan, Mohammed Z. U., 0F Konyakhin, Igor A., 0H, 1E, 1H Kozma, P., 0S Kraszewski, Maciej, 0M Krauze, W., 0Y Kühmstedt, Peter, 08 Kujawinska, M., 0Y Kumar, N., 0S Lashmanov, Oleg U., 1C Leger, James R., 0Q Lehnen, Stephan, 0W Levin, Alexander D., 0P Li, Lifeng, 05, 1G Li, Weiqi, 17, 19 Lin, Di, 0Q Liu, Shiyuan, 17, 19 Lizana, Angel, 16, 1A Lohner, T., 0S Madanipour, Khosro, 1Q Major, C., 0S Makowski, P., 0Y Máquez, Andrés, 1A Marshall, Richard J., 0X Martínez, Jose Luis, 1A Matsak, Ivan S., 0K Meah, Chris J., 0X Molev, Fedor, 1E Mompart, Jordi, 16 Mora-González, Miguel, 12 Moreno, Ignacio, 1A Mroczka, Janusz, 1F, 1L Muñoz-Maciel, Jesús, 12 Muzychenko, Yana B, 1M Nador, J., 0S Neutov, Mikhail Y., 1N Notni, Gunther, 08 Osten, Wolfgang, 0Z Ostrowski, Mariusz, 1L Peinado, Alba, 16, 1A Peña-Lecona, Francisco G., 12 Peng, HeKuo, 0L Pereira, S. F., 07, 0S Petrik, P., 0S Petrochenko, Andrew V., 1H Pettazzi, F., 0O Plachta, Kamil, 1F Plucinski, Jerzy, 0M Qi, Te, 14 Quinten, M., 0R Ramírez, Claudio, 11, 1A Reiners, Ansgar, 0I Sakhariyanova, Aiganym M., 0H Schau, Philipp, 0Z Shen, Biyao, 1G Shmytkova, Ekaterina A., 0P Silver, Richard M., 0V Skorupski, Krzysztof, 0N Smekhov, Andrey, 0H Soskind, M., 1O Soskind, Y. G., 1O Stork, Wilhelm, 09, 0G Strqkowski, Marcin R., 0M Streck, Andreas, 09 Styles, Iain B., 0X Swirniak, Grzegorz, 1D Tan, Yi, 0C Tolstoba, Nadezhda D., 1N Trojanowski, Michal, 0M Turola, Massimo, 0X Turpin, Alex, 16 Urbach, H. P., 07, 0S van der Donck, J., 0O Vannoni, Maurizio, 0A Wang, Shuai, 0C, 13 Wu, Hongyan, 0L Wu, Xin, 14 Wurm, Matthias, 0U Xu, Bing, 13 Xu, Haiyan, 0L Xu, Xihong, 05 Yang, Lin, 06 Yang, Ping, 0C, 13 Yu, Yingjie, 14 Zeng, Lijiang, 1G Zhang, Chuanwei, 17, 19 Zhang, Linna, 14 Zhang, Nien Fan, 0V Zheng, Xuejie, 1A Zhou, Hui, 0V Zhu, Yan, 07 Zinchik, Alexander A., 1M Zverev, Victor, 1I Conference CommitteeSymposium Chairs Wolfgang Osten, Institut für Technische Optik (Germany) Gunther Notni, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany) Andrew John Moore, Heriot-Watt University (United Kingdom) Conference Chair Bernd Bodermann, Physikalisch-Technische Bundesanstalt (Germany) Conference Co-chairs Karsten Frenner, Institut für Technische Optik (Germany) Richard M. Silver, National Institute of Standards and Technology (United States) Conference Programme Committee Markus Bär, Physikalisch-Technische Bundesanstalt (Germany) Jörg Bischoff, Osires Optical Engineering (Germany) Harald Bosse, Physikalisch-Technische Bundesanstalt (Germany) Sven Burger, Konrad-Zuse-Zentrum für Informationstechnik (Germany) Peter Evanschitzky, Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB (Germany) Christian Hafner, ETH Zürich (Switzerland) Wolfgang Holzapfel, DR. JOHANNES HEIDENHAIN GmbH (Germany) Bernd H. Kleemann, Carl Zeiss AG (Germany) Wolfgang Osten, Institut für Technische Optik (Germany) Andreas Rathsfeld, Weierstrass-Institut für Angewandte Analysis und Stochastik (Germany) Thomas Scherübl, Carl Zeiss SMS GmbH (Germany) Patrick Schiavone, Aselta Nanographics (France) Irwan D. Setija, ASML Netherlands B.V. (Netherlands) Michael Totzeck, Carl Zeiss AG (Germany) Jari Turunen, University of Eastern Finland (Finland) Frank Wyrowski, Friedrich-Schiller-Universität Jena (Germany) Session Chairs 1 Scatterometry I Sven Burger, JCMwave GmbH (Germany) 2 Interferometry and Phase I Bernd Bodermann, Physikalisch-Technische Bundesanstalt (Germany) Christof Pruss, Institut für Technische Optik (Germany) 3 Radiometry and Photometry Liwei Fu, Universität Stuttgart (Germany) 4 Optical Systems Wolfgang Holzapfel, DR. JOHANNES HEIDENHAIN GmbH (Germany) 5 Stochastic Scattering and Nanoparticles Egbert Buhr, Physikalisch-Technische Bundesanstalt (Germany) 6 Optical Material Parameters and Thin Films Michael Schulz, Physikalisch-Technische Bundesanstalt (Germany) 7 Scatterometry II Bernd Bodermann, Physikalisch-Technische Bundesanstalt (Germany) 8 Microscopy and Imaging Karsten Frenner, Institut für Technische Optik (Germany) 9 Interferometry and Phase II Wolfgang Osten, Institut für Technische Optik (Germany) 10 Mueller Polarimetry Peter Petrik, Research Institute for Technical Physics and Materials Science (Hungary) |
