Traceability in interferometric form metrology

M. Schulz; G. Blobel; I. Fortmeier; M. Stavridis; C. Elster

doi:10.1117/12.2191136

22 June 2015 Traceability in interferometric form metrology

M. Schulz, G. Blobel, I. Fortmeier, M. Stavridis, C. Elster

Proceedings Volume 9525, Optical Measurement Systems for Industrial Inspection IX; 95251F (2015) https://doi.org/10.1117/12.2191136
Event: SPIE Optical Metrology, 2015, Munich, Germany

Abstract

The concept of traceability is presented for the interferometric form measurement of optical surfaces. The calibration chain for interferometric flatness measurement is evaluated in detail, showing that only a few influence quantities are significant. For spherical surfaces, the complexity increases as the measurement separates into sphericity and radius measurement. Traceability in asphere metrology is much more complex, and some aspects are discussed in terms of the example of the Tilted-Wave Interferometer concept.

Citation Download Citation

M. Schulz, G. Blobel, I. Fortmeier, M. Stavridis, and C. Elster "Traceability in interferometric form metrology", Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 95251F (22 June 2015); https://doi.org/10.1117/12.2191136

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