Multiplex acquisition approach for high speed 3D measurements with a chromatic confocal microscope

Miro Taphanel; Ralf Zink; Thomas Längle; Jürgen Beyerer

doi:10.1117/12.2184560

22 June 2015 Multiplex acquisition approach for high speed 3D measurements with a chromatic confocal microscope

Miro Taphanel, Ralf Zink, Thomas Längle, Jürgen Beyerer

Proceedings Volume 9525, Optical Measurement Systems for Industrial Inspection IX; 95250Y (2015) https://doi.org/10.1117/12.2184560
Event: SPIE Optical Metrology, 2015, Munich, Germany

Abstract

A technical realization of a multispectral camera is proposed, by multiplexing a light source with six different spectra. A monochrome line scan camera with six pixel rows is used as detector. The special feature of this acquisition approach is its high speed capability. The scan speed is as high as the frame rate of the line scan camera and not affected by the multiplexing. As application a chromatic confocal microscope was build up. From a data acquisition perspective up to 284 million 3D points per second can be measured. A real time signal processing is proposed, too.

Citation Download Citation

Miro Taphanel, Ralf Zink, Thomas Längle, and Jürgen Beyerer "Multiplex acquisition approach for high speed 3D measurements with a chromatic confocal microscope", Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 95250Y (22 June 2015); https://doi.org/10.1117/12.2184560

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