EUV ablation: a study of the process

Chiara Liberatore; Andrzej Bartnik; Inam Ul Ahad; Martina Toufarová; Irena Matulková; Věra Hájková; Luděk Vyšín; Tomáš Burian; Libor Juha; Ladislav Pina; Akira Endo; Tomas Mocek

doi:10.1117/12.2178868

12 May 2015 EUV ablation: a study of the process

Chiara Liberatore, Andrzej Bartnik, Inam Ul Ahad, Martina Toufarová, Irena Matulková, Věra Hájková, Luděk Vyšín, Tomáš Burian, Libor Juha, Ladislav Pina, Akira Endo, Tomas Mocek

Author Affiliations +

Proceedings Volume 9510, EUV and X-ray Optics: Synergy between Laboratory and Space IV; 951011 (2015) https://doi.org/10.1117/12.2178868
Event: SPIE Optics + Optoelectronics, 2015, Prague, Czech Republic

Abstract

An investigation on short-wavelength ablation mechanism of poly(1,4-phenylene ether ether-sulfune) PPEESand poly (1-hexadecene-sulfone) PHDS (Figure 9-10) by EUV radiation is presented. The goal of this work is to evaluate the ablation behavior with respect to the influence of wavelength, fluence and quantum efficiency. Because there is no yet a general EUV ablation theory, data are analyzed in order to underline regularity of the process which can be used in future to detect the scaling laws of the process. The differences with longer wavelengths ablation and EUV one are pointed out and possible applications of EUV ablation are proposed.

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Chiara Liberatore, Andrzej Bartnik, Inam Ul Ahad, Martina Toufarová, Irena Matulková, Věra Hájková, Luděk Vyšín, Tomáš Burian, Libor Juha, Ladislav Pina, Akira Endo, and Tomas Mocek "EUV ablation: a study of the process", Proc. SPIE 9510, EUV and X-ray Optics: Synergy between Laboratory and Space IV, 951011 (12 May 2015); https://doi.org/10.1117/12.2178868

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