Comb structure analysis of the capacitive sensitive element in MEMS-accelerometer

Andrew Shalimov; Sergey Timoshenkov; Natalia Korobova; Maxim Golovinskiy; Alexey Timoshenkov; Egor Zuev; Svetlana Berezueva; Andrey Kosolapov

doi:10.1117/12.2176815

22 May 2015 Comb structure analysis of the capacitive sensitive element in MEMS-accelerometer

Andrew Shalimov, Sergey Timoshenkov, Natalia Korobova, Maxim Golovinskiy, Alexey Timoshenkov, Egor Zuev, Svetlana Berezueva, Andrey Kosolapov

Author Affiliations +

Proceedings Volume 9467, Micro- and Nanotechnology Sensors, Systems, and Applications VII; 94672W (2015) https://doi.org/10.1117/12.2176815
Event: SPIE Defense + Security, 2015, Baltimore, MD, United States

Abstract

In this paper analysis of comb design for the sensing element MEMS accelerometer with longitudinal displacement of the inertial mass under the influence of acceleration to obtain the necessary parameters for the further construction of an electronic circuit for removal and signal processing has been done. Fixed on the stator the inertia mass has the ability to move under the influence of acceleration along the longitudinal structure. As a result the distance between the fixed and movable combs, and hence the capacitance in the capacitors have been changed. Measuring the difference of these capacitances you can estimate the value of the applied acceleration. Furthermore, managing combs that should apply an electrostatic force for artificial deviation of the inertial mass may be used for the initial sensitive elements culling. Also in this case there is a change of capacitances, which can be measured by the comb and make a decision about the spoilage presence or absence.

Citation Download Citation

Andrew Shalimov, Sergey Timoshenkov, Natalia Korobova, Maxim Golovinskiy, Alexey Timoshenkov, Egor Zuev, Svetlana Berezueva, and Andrey Kosolapov "Comb structure analysis of the capacitive sensitive element in MEMS-accelerometer", Proc. SPIE 9467, Micro- and Nanotechnology Sensors, Systems, and Applications VII, 94672W (22 May 2015); https://doi.org/10.1117/12.2176815

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