Multiple-grating self-correcting algorithm for processed mark measurement error

Tao Zhang; Jiubin Tan; Jiwen Cui

doi:10.1117/12.2181178

6 March 2015 Multiple-grating self-correcting algorithm for processed mark measurement error

Tao Zhang, Jiubin Tan, Jiwen Cui

Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 94462M (2015) https://doi.org/10.1117/12.2181178
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China

Abstract

When substrate is processed, also any measurement grating marks available on the substrate will be influenced: they will be deformed asymmetrically, which gives rise to a measurement-shift error when measuring such a grating mark. To measure on a processed mark, an algorithm is used. This algorithm describes a method to calculate the weight factor of the information from each order. The weight factors of such an algorithm are based on a model which describes the measurement position as a function of the diffraction orders and the mark position. This paper proposes an algorithm for finding these weight factors, and the feasibility of the method is validated through simulation.

Citation Download Citation

Tao Zhang, Jiubin Tan, and Jiwen Cui "Multiple-grating self-correcting algorithm for processed mark measurement error", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94462M (6 March 2015); https://doi.org/10.1117/12.2181178

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