In-Situ RHEED Studies To Understand The Dislocation Formation Process In Growth Of InGaAs on GaAs

Paul R. Berger; Kevin H. Chang; Pallab Bhattacharya; Jasprit Singh; K. K. Bajaj

doi:10.1117/12.947345

15 August 1988 In-Situ RHEED Studies To Understand The Dislocation Formation Process In Growth Of InGaAs on GaAs

Paul R. Berger, Kevin H. Chang, Pallab Bhattacharya, Jasprit Singh, K. K. Bajaj

Proceedings Volume 0944, Growth of Compound Semiconductor Structures II; (1988) https://doi.org/10.1117/12.947345
Event: Advances in Semiconductors and Superconductors: Physics and Device Applications, 1988, Newport Beach, CA, United States

Abstract

A detailed study of reflection high energy electron diffraction (RHEED) during growth of InxGai_xAs (0 < x 5_0.5) on GaAs was carried out. We focussed on the initial stages of growth where the growth is expected to be under coherent strain. RHEED studies provide us information on the growth front which is quite different from what is found in the lattice matched systems. In lattice matched systems, as the growth temperature is increased, the growth front becomes increasingly smooth (below congruent temperature) due to the enhanced surface kinetics. However, in the presence of strain we find that increased substrate temperature produces a growth front which is 3-dimensional in nature. This effect is explained by the reasoning that the equilibrium surface for the lattice matched systems are atomically smooth and that for a strained surface can be 3-dimensional depending upon surface strain.

Citation Download Citation

Paul R. Berger, Kevin H. Chang, Pallab Bhattacharya, Jasprit Singh, and K. K. Bajaj "In-Situ RHEED Studies To Understand The Dislocation Formation Process In Growth Of InGaAs on GaAs", Proc. SPIE 0944, Growth of Compound Semiconductor Structures II, (15 August 1988); https://doi.org/10.1117/12.947345

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available