Electric-field assisted assembly of core-shell nanoparticle arrays for contact hole patterning

Lan Lin; Xuexue Guo; Theresa S. Mayer

doi:10.1117/12.2087547

19 March 2015 Electric-field assisted assembly of core-shell nanoparticle arrays for contact hole patterning

Lan Lin, Xuexue Guo, Theresa S. Mayer

Proceedings Volume 9423, Alternative Lithographic Technologies VII; 94231U (2015) https://doi.org/10.1117/12.2087547
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States

Abstract

In this paper, we investigate an electric-field assisted assembly approach to create dense arrays of contact hole patterns with complex feature geometries. This hybrid strategy uses a spatially varying dielectrophoretic (DEP) force created by lithographically defined guiding features to assemble dense arrays of nanoparticles within the features, thereby replicating features within the starting pattern. For close-packed particle arrays, the half- and full-pitch of the contact hole array is defined by the starting nanoparticle core and shell diameter.

Citation Download Citation

Lan Lin, Xuexue Guo, and Theresa S. Mayer "Electric-field assisted assembly of core-shell nanoparticle arrays for contact hole patterning", Proc. SPIE 9423, Alternative Lithographic Technologies VII, 94231U (19 March 2015); https://doi.org/10.1117/12.2087547

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