Fabrication and characterization of micro-structures created by direct laser writing in multi-layered chalcogenide glasses

Casey M. Schwarz; Chris N. Grabill; Benn Gleason; Gerald D. Richardson; Anna M. Lewis; Aadit Vyas; Clara Rivero-Baleine; Kathleen A. Richardson; Alexej Pogrebnyakov; Theresa S. Mayer; Stephen M. Kuebler

doi:10.1117/12.2077629

13 March 2015 Fabrication and characterization of micro-structures created by direct laser writing in multi-layered chalcogenide glasses

Casey M. Schwarz, Chris N. Grabill, Benn Gleason, Gerald D. Richardson, Anna M. Lewis, Aadit Vyas, Clara Rivero-Baleine, Kathleen A. Richardson, Alexej Pogrebnyakov, Theresa S. Mayer, Stephen M. Kuebler

Author Affiliations +

Proceedings Volume 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII; 937403 (2015) https://doi.org/10.1117/12.2077629
Event: SPIE OPTO, 2015, San Francisco, California, United States

Abstract

Arsenic trisulfide (As2S3) is a chalcogenide (ChG) material with excellent infrared (IR) transparency (620 nm to 11 μm), low phonon energies, and large nonlinear refractive indices. These properties directly relate to commercial and industrial applications including sensors, photonic waveguides, and acousto-optics. Multi-photon exposure can be used to photopattern thermally deposited As₂S₃ ChG glassy films of molecular clusters. Immersing the photo-patterned cross-linked material into a polar-solvent removes the unexposed material leaving behind a structure that is a negative-tone replica of the photo-pattern. Nano-structure arrays that were photo-patterned in single-layered As₂S₃ films through multi-photon direct laser writing (DLW) resulted in the production of nano-beads as a consequence of a standing wave effect. To overcome this effect, an anti-reflective (AR) layer of arsenic triselenide (As2Se₃) was thermally deposited between the silicon substrate and the As₂S₃ layer, creating a multi-layered film. The chemical composition of the unexposed and photo-exposed multi-layered film was examined through Raman spectroscopy. Nano-structure arrays were photopatterned in the multi-layered film and the resulting structure, morphology, and chemical composition were characterized, compared to results from the single-layered film, and correlated with the conditions of the thermal deposition, patterned irradiation, and etch processing.

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Casey M. Schwarz, Chris N. Grabill, Benn Gleason, Gerald D. Richardson, Anna M. Lewis, Aadit Vyas, Clara Rivero-Baleine, Kathleen A. Richardson, Alexej Pogrebnyakov, Theresa S. Mayer, and Stephen M. Kuebler "Fabrication and characterization of micro-structures created by direct laser writing in multi-layered chalcogenide glasses", Proc. SPIE 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII, 937403 (13 March 2015); https://doi.org/10.1117/12.2077629

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