The research on conformal acid etching process of glass ceramic

Kepeng Wang; Peiji Guo

doi:10.1117/12.2067877

6 August 2014 The research on conformal acid etching process of glass ceramic

Kepeng Wang, Peiji Guo

Proceedings Volume 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 92812I (2014) https://doi.org/10.1117/12.2067877
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

A series of experiments have been done to explore the effect of different conditions on the hydrofluoric acid etching. The hydrofluoric acid was used to etch the glass ceramic called “ZERODUR”, which is invented by SCHOTT in Germany. The glass ceramic was processed into cylindrical samples. The hydrofluoric acid etching was done in a plastic beaker. The concentration of hydrofluoric acid and the etching time were changed to measure the changes of geometric tolerance and I observed the surface using a microscope in order to find an appropriate condition of hydrofluoric acid etching.

Citation Download Citation

Kepeng Wang and Peiji Guo "The research on conformal acid etching process of glass ceramic", Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 92812I (6 August 2014); https://doi.org/10.1117/12.2067877

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