Toward achromatic soft x-ray imaging system with sub-10-nm spatial resolution

Satoru Egawa; Hidekazu Mimura

doi:10.1117/12.2062702

5 September 2014 Toward achromatic soft x-ray imaging system with sub-10-nm spatial resolution

Satoru Egawa, Hidekazu Mimura

Proceedings Volume 9207, Advances in X-Ray/EUV Optics and Components IX; 92070R (2014) https://doi.org/10.1117/12.2062702
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

The Wolter mirror has been a promising imaging device in X-ray microscopy owing to its excellent characteristics such as no achromatic aberration, a large aperture and a long work distance. Despite its long history, a Wolter mirror has not been practically used for high resolution microscopy because extremely high figure accuracy is required on the surface. In this paper, we will show the result of optical simulations targeted at the design of a soft X-ray imaging system with sub-10nm spatial resolution.

Citation Download Citation

Satoru Egawa and Hidekazu Mimura "Toward achromatic soft x-ray imaging system with sub-10-nm spatial resolution", Proc. SPIE 9207, Advances in X-Ray/EUV Optics and Components IX, 92070R (5 September 2014); https://doi.org/10.1117/12.2062702

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