A reflectometer for at-wavelength characterization of XUV-reflection gratings

F. Eggenstein; P. Bischoff; A. Gaupp; F. Senf; A. Sokolov; T. Zeschke; F. Schäfers

doi:10.1117/12.2061828

5 September 2014 A reflectometer for at-wavelength characterization of XUV-reflection gratings

F. Eggenstein, P. Bischoff, A. Gaupp, F. Senf, A. Sokolov, T. Zeschke, F. Schäfers

Proceedings Volume 9206, Advances in Metrology for X-Ray and EUV Optics V; 920607 (2014) https://doi.org/10.1117/12.2061828
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

Within our technology center for production of highly efficient precision gratings a versatile 4-circle UHV-reflectometer for synchrotron radiation based at-wavelength characterization has been fabricated. The main feature is the possibility to incorporate real live-sized gratings. The samples are adjustable within six degrees of freedom by a novel UHV-tripod system, and the reflectivity can be measured at all incidence angles for both s- and p-polarization geometry. The reflectometer has been setup in a clean room hutch and it is coupled permanently to the optics beamline PM-1 for the UV and XUV range with the polarization adjustable to either linear or elliptical. The setup will be open to users by the end of 2014.

Citation Download Citation

F. Eggenstein, P. Bischoff, A. Gaupp, F. Senf, A. Sokolov, T. Zeschke, and F. Schäfers "A reflectometer for at-wavelength characterization of XUV-reflection gratings", Proc. SPIE 9206, Advances in Metrology for X-Ray and EUV Optics V, 920607 (5 September 2014); https://doi.org/10.1117/12.2061828

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