Microscopic type of real-time uniaxial 3D profilometry by polarization camera

Shuhei Shibata; Fumio Kobayashi; Daisuke Barada; Yukitoshi Otani

doi:10.1117/12.2063439

18 August 2014 Microscopic type of real-time uniaxial 3D profilometry by polarization camera

Shuhei Shibata, Fumio Kobayashi, Daisuke Barada, Yukitoshi Otani

Proceedings Volume 9203, Interferometry XVII: Techniques and Analysis; 920311 (2014) https://doi.org/10.1117/12.2063439
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

This paper introduces a novel polarization structured light pattern projector was done by taking into account the unique characteristic of the pixelated camera and a spatial light modulator (SLM) used. Height variations of reflective samples are retrieved by using fringe contrast modulation on an uniaxial configuration. By placing a special retardance pattern on the SLM, the pixelated camera will detect a phase shifted sinusoidal pattern where later its contrast change will be used to retrieve the height information of the sample under study. The presented system takes into account the defocus change obtained by the height variation of the sample by encoding the information on the fringe contrast of the projected structured light pattern by the SLM. The final purpose of this work is to present a single shot 3D profilometry system based in fringe contrast analysis. Experimental results of a moving glass slide are presented.

Citation Download Citation

Shuhei Shibata, Fumio Kobayashi, Daisuke Barada, and Yukitoshi Otani "Microscopic type of real-time uniaxial 3D profilometry by polarization camera", Proc. SPIE 9203, Interferometry XVII: Techniques and Analysis, 920311 (18 August 2014); https://doi.org/10.1117/12.2063439

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