Paper
25 September 2014 Multi-functional diffractive optical elements
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Abstract
Diffractive optics has traditionally been used to transform a parallel beam of light into a pattern with a desired phase and intensity distribution. One of the advantages of using diffractive optics is the fact that multiple functions can be integrated into one element. Although, in theory several functions can be combined, the efficiency reduces with each added function. Also, depending on the nature of each function, feature sizes could get finer. Optical lithography with its 1 μm limit becomes inadequate for fabrication and sophisticated tools such as e-beam lithography and focused ion beam milling are required. In this paper, two different techniques of fabrication of composite elements are studied. A comparison of the beams generated in both cases is presented.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Vijayakumar and Shanti Bhattacharya "Multi-functional diffractive optical elements", Proc. SPIE 9194, Laser Beam Shaping XV, 91940Q (25 September 2014); https://doi.org/10.1117/12.2067929
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Cited by 1 scholarly publication.
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KEYWORDS
Axicons

Binary data

Diffraction gratings

Diffractive optical elements

Analog electronics

Electron beam lithography

Composites

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