In-situ analysis of defect formation in coat develop track process

Masahiko Harumoto; Harold Stokes; Osamu Tamada; Tadashi Miyagi; Koji Kaneyama; Charles Pieczulewski; Masaya Asai

doi:10.1117/12.2045876

27 March 2014 In-situ analysis of defect formation in coat develop track process

Masahiko Harumoto, Harold Stokes, Osamu Tamada, Tadashi Miyagi, Koji Kaneyama, Charles Pieczulewski, Masaya Asai

Proceedings Volume 9051, Advances in Patterning Materials and Processes XXXI; 90510P (2014) https://doi.org/10.1117/12.2045876
Event: SPIE Advanced Lithography, 2014, San Jose, California, United States

Abstract

Typical defects to be resolved during coat-develop track processing have been confirmed during each resist generation; I-line, KrF, ArF, ArF immersion, and recently EUVV.[1-5] In this study, two types of defect formation were analyzed: organic film post coating non-uniformity spots and post develop water-marks. During substrate rotation,, a high-speed video camera is used to observe characteristic phenomena which lead to the generation of these rather typical defects. Post coating non-uniformity defects were linked to bubble formation, and post develop defects were associated with thee wafer drying conditions. By correlating high-speed camera images and defect inspection results from several different resists we can disclose the defect generation mechanism of multiple typical phenomena.

Citation Download Citation

Masahiko Harumoto, Harold Stokes, Osamu Tamada, Tadashi Miyagi, Koji Kaneyama, Charles Pieczulewski, and Masaya Asai "In-situ analysis of defect formation in coat develop track process", Proc. SPIE 9051, Advances in Patterning Materials and Processes XXXI, 90510P (27 March 2014); https://doi.org/10.1117/12.2045876

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available