ANSYS simulation of the capacitance coupling of quartz tuning fork gyroscope

Qing Zhang; Lihui Feng; Ke Zhao; Fang Cui; Yu-nan Sun

doi:10.1117/12.2044962

20 December 2013 ANSYS simulation of the capacitance coupling of quartz tuning fork gyroscope

Qing Zhang, Lihui Feng, Ke Zhao, Fang Cui, Yu-nan Sun

Proceedings Volume 9044, 2013 International Conference on Optical Instruments and Technology: Optical Sensors and Applications; 90441L (2013) https://doi.org/10.1117/12.2044962
Event: International Conference on Optical Instruments and Technology (OIT2013), 2013, Beijing, China

Abstract

Coupling error is one of the main error sources of the quartz tuning fork gyroscope. The mechanism of capacitance coupling error is analyzed in this article. Finite Element Method (FEM) is used to simulate the structure of the quartz tuning fork by ANSYS software. The voltage output induced by the capacitance coupling is simulated with the harmonic analysis and characteristics of electrical and mechanical parameters influenced by the capacitance coupling between drive electrodes and sense electrodes are discussed with the transient analysis.

Citation Download Citation

Qing Zhang, Lihui Feng, Ke Zhao, Fang Cui, and Yu-nan Sun "ANSYS simulation of the capacitance coupling of quartz tuning fork gyroscope", Proc. SPIE 9044, 2013 International Conference on Optical Instruments and Technology: Optical Sensors and Applications, 90441L (20 December 2013); https://doi.org/10.1117/12.2044962

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