Demonstration of high-performance, sub-micron chalcogenide glass photonic devices by thermal nanoimprint

Yi Zou; Loise Moreel; Jie Zhou; Danning Zhang; Hongtao Lin; Lan Li; Qingyang Du; Juejun Hu; Sylvain Danto; Kathleen Richardson; J. David Musgraves; Kevin D. Dobson; Robert Birkmire

doi:10.1117/12.2040454

8 March 2014 Demonstration of high-performance, sub-micron chalcogenide glass photonic devices by thermal nanoimprint

Yi Zou, Loise Moreel, Jie Zhou, Danning Zhang, Hongtao Lin, Lan Li, Qingyang Du, Juejun Hu, Sylvain Danto, Kathleen Richardson, J. David Musgraves, Kevin D. Dobson, Robert Birkmire

Author Affiliations +

Proceedings Volume 8988, Integrated Optics: Devices, Materials, and Technologies XVIII; 898806 (2014) https://doi.org/10.1117/12.2040454
Event: SPIE OPTO, 2014, San Francisco, California, United States

Abstract

High-index-contrast optical devices form the backbone of densely integrated photonic circuits. While these devices are traditionally fabricated using lithography and etching, their performance is often limited by defects and sidewall roughness arising from fabrication imperfections. This paper reports a versatile, roll-to-roll and backend compatible technique for the fabrication of high-performance, high-index-contrast photonic structures in composition-engineered chalcogenide glass (ChG) thin films. Thin film ChG have emerged as important materials for photonic applications due to their high refractive index, excellent transparency in the infrared and large Kerr non-linearity. Both thermally evaporated and solution processed As-Se thin films are successfully employed to imprint waveguides and micro-ring resonators with high replicability and low surface roughness (0.9 nm). The micro-ring resonators exhibit an ultra-high quality-factor of 4 × 10⁵ near 1550 nm wavelength, which represents the highest value reported in ChG micro-ring resonators. Furthermore, sub-micron nanoimprint of ChG films on non-planar plastic substrates is demonstrated, which establishes the method as a facile route for monolithic fabrication of high-index-contrast devices on a wide array of unconventional substrates.

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Yi Zou, Loise Moreel, Jie Zhou, Danning Zhang, Hongtao Lin, Lan Li, Qingyang Du, Juejun Hu, Sylvain Danto, Kathleen Richardson, J. David Musgraves, Kevin D. Dobson, and Robert Birkmire "Demonstration of high-performance, sub-micron chalcogenide glass photonic devices by thermal nanoimprint", Proc. SPIE 8988, Integrated Optics: Devices, Materials, and Technologies XVIII, 898806 (8 March 2014); https://doi.org/10.1117/12.2040454

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KEYWORDS

Resonators

Microrings

Waveguides

Nanoimprint lithography

Photonic devices

Glasses

Chalcogenide glass

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