Highly efficient InGaN MQW LEDs grown on 200 mm Si substrates

Masaaki Onomura

doi:10.1117/12.2041082

8 March 2014 Highly efficient InGaN MQW LEDs grown on 200 mm Si substrates

Masaaki Onomura

Proceedings Volume 8986, Gallium Nitride Materials and Devices IX; 898620 (2014) https://doi.org/10.1117/12.2041082
Event: SPIE OPTO, 2014, San Francisco, California, United States

Abstract

We demonstrate InGaN MQW LEDs on Si substrates have both high performance and low cost structure. The blue LED structures were grown by metal-organic chemical vapor deposition via unique buffer layers on 200 mm-diameter Si (111) substrates. The epitaxial wafers had slightly ex-situ convex bow without micro-cracks. Median and standard deviation of dominant wavelength by photoluminescence measurement were 448.9 nm and 2.0 nm within 4 mm edge exclusion, respectively. XRC FWHMs of GaN (0002) and GaN (10-12) were 341 arcsec and 388 arcsec, respectively, corresponding to be estimated to edge dislocation density of 2.0 × 10⁹ /cm². The blue LED structures were fabricated by legacy 8-inch (200-mm) Si device equipment without remodeling, because no particular thicker Si wafer was needed for our LED epitaxial growth. Encapsulated blue lamps were fabricated after dicing with 45 × 45 mil². Median light output power of 641 mW was obtained under injection current of 350 mA at 25 deg-C. The operating voltage was 2.9 V. It corresponds to wall plug efficiency, WPE of 63 %. Stable operation more than 6,000 hours under 450 mA at 85 deg-C was confirmed. These results suggest the InGaN MQW LEDs on the large-scale Si wafers are promising for the near future solid-state lighting.

Citation Download Citation

Masaaki Onomura "Highly efficient InGaN MQW LEDs grown on 200 mm Si substrates", Proc. SPIE 8986, Gallium Nitride Materials and Devices IX, 898620 (8 March 2014); https://doi.org/10.1117/12.2041082

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available