Silicon nanowires reliability and robustness investigation using AFM-based techniques

Tomasz Bieniek; Grzegorz Janczyk; Paweł Janus; Piotr Grabiec; Marek Nieprzecki; Grzegorz Wielgoszewski; Magdalena Moczała; Teodor Gotszalk; Elizabeth Buitrago; Montserrat Fernandez-Bolaños Badia; Adrian M. Ionescu

doi:10.1117/12.2031229

25 July 2013 Silicon nanowires reliability and robustness investigation using AFM-based techniques

Tomasz Bieniek, Grzegorz Janczyk, Paweł Janus, Piotr Grabiec, Marek Nieprzecki, Grzegorz Wielgoszewski, Magdalena Moczała, Teodor Gotszalk, Elizabeth Buitrago, Montserrat Fernandez-Bolaños Badia, Adrian M. Ionescu

Author Affiliations +

Proceedings Volume 8902, Electron Technology Conference 2013; 89022L (2013) https://doi.org/10.1117/12.2031229
Event: Electron Technology Conference 2013, 2013, Ryn, Poland

Abstract

Silicon nanowires (SiNWs) have undergone intensive research for their application in novel integrated systems such as field effect transistor (FET) biosensors and mass sensing resonators profiting from large surface-to-volume ratios (nano dimensions). Such devices have been shown to have the potential for outstanding performances in terms of high sensitivity, selectivity through surface modification and unprecedented structural characteristics. This paper presents the results of mechanical characterization done for various types of suspended SiNWs arranged in a 3D array. The characterization has been performed using techniques based on atomic force microscopy (AFM). This investigation is a necessary prerequisite for the reliable and robust design of any biosensing system. This paper also describes the applied investigation methodology and reports measurement results aggregated during series of AFM-based tests.

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Tomasz Bieniek, Grzegorz Janczyk, Paweł Janus, Piotr Grabiec, Marek Nieprzecki, Grzegorz Wielgoszewski, Magdalena Moczała, Teodor Gotszalk, Elizabeth Buitrago, Montserrat Fernandez-Bolaños Badia, and Adrian M. Ionescu "Silicon nanowires reliability and robustness investigation using AFM-based techniques", Proc. SPIE 8902, Electron Technology Conference 2013, 89022L (25 July 2013); https://doi.org/10.1117/12.2031229

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