Fabrication and performance evaluation of pixelated nano-wire grid polarizer

Shengkui Gao; Raphael Njuguna; Viktor Gruev

doi:10.1117/12.2023115

27 September 2013 Fabrication and performance evaluation of pixelated nano-wire grid polarizer

Shengkui Gao, Raphael Njuguna, Viktor Gruev

Proceedings Volume 8873, Polarization Science and Remote Sensing VI; 88730L (2013) https://doi.org/10.1117/12.2023115
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

Metal-based nano-wire grid polarizer (NWGP) is widely used in division of focal plane (DoFP) imaging sensors to capture polarization information of the imaged environment. In this paper, we present a procedure for fabricating aluminum pixelated NWGP structures using electron beam lithography (EBL) and reactive ion etching (RIE). We evaluate optical performance of the NWGP structures in terms of different orientations (0°, 45°, 90°, 135°), line widths (50nm to 500nm), and spectral response (460nm to 625nm).

Citation Download Citation

Shengkui Gao, Raphael Njuguna, and Viktor Gruev "Fabrication and performance evaluation of pixelated nano-wire grid polarizer", Proc. SPIE 8873, Polarization Science and Remote Sensing VI, 88730L (27 September 2013); https://doi.org/10.1117/12.2023115

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