Design optimization of ultra-precise elliptical mirrors for hard x-ray nanofocusing at Nanoscopium

Cameron M. Kewish; François Polack; Riccardo Signorato; Andrea Somogyi

doi:10.1117/12.2026026

26 September 2013 Design optimization of ultra-precise elliptical mirrors for hard x-ray nanofocusing at Nanoscopium

Cameron M. Kewish, François Polack, Riccardo Signorato, Andrea Somogyi

Proceedings Volume 8851, X-Ray Nanoimaging: Instruments and Methods; 88510G (2013) https://doi.org/10.1117/12.2026026
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

The design and implementation of a pair of 100 mm-long grazing-incidence total-reflection mirrors for the hard X-ray beamline Nanoscopium at Synchrotron Soleil is presented. A vertically and horizontally nanofocusing mirror pair, oriented in Kirkpatrick-Baez geometry, has been designed and fabricated with the aim of creating a diffraction-limited high-intensity 5 − 20 keV beam with a focal spot size as small as 50 nm. We describe the design considerations, including wave-optical calculations of figures-of-merit that are relevant for spectromicroscopy, such as the focal spot size, depth of field and integrated intensity. The mechanical positioning tolerance in the pitch angle that is required to avoid introducing high-intensity features in the neighborhood of the focal spot is demonstrated with simulations to be of the order of microradians, becoming tighter for shorter focal lengths and therefore directly affecting all nanoprobe mirror systems. Metrology results for the completed mirrors are presented, showing that better than 1.5 °A-rms figure error has been achieved over the full mirror lengths with respect to the designed elliptical surfaces, with less than 60 nrad-rms slope errors.

Citation Download Citation

Cameron M. Kewish, François Polack, Riccardo Signorato, and Andrea Somogyi "Design optimization of ultra-precise elliptical mirrors for hard x-ray nanofocusing at Nanoscopium", Proc. SPIE 8851, X-Ray Nanoimaging: Instruments and Methods, 88510G (26 September 2013); https://doi.org/10.1117/12.2026026

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available