Automated cylindrical mapper using chromatic confocal measurement

Esmaeil Heidari; Kevin G. Harding; Robert W. Tait

doi:10.1117/12.2023760

20 September 2013 Automated cylindrical mapper using chromatic confocal measurement

Esmaeil Heidari, Kevin G. Harding, Robert W. Tait

Proceedings Volume 8839, Dimensional Optical Metrology and Inspection for Practical Applications II; 88390F (2013) https://doi.org/10.1117/12.2023760
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

Characterization of a surface shape and finish has been vital for the manufacture of precision parts. Overall profile, surface finish and waviness of a part can be measured in two ways, contact and non-contact. In the contact method a stylus is dragged on the surface of a part to measure the profile and texture of the part for quantifying the surface characteristics. Non-contact methods applied z precision metrology include: microscopy, interferometry, chromatic confocal microscopy and laser profiling such as structured light methods. The chromatic confocal method offers flexibility because of its fiber optics probes that can be manipulated to accommodate many sample geometries. This flexibility provides a wide range of possible analysis dimensions such as cylindrical shapes of holes and the potential to provide both surface roughness and shape. This paper will discuss the setup and testing of a system specifically for measuring cylindrical shaped parts and present the performance of the technology as a precision metrology tool.

Citation Download Citation

Esmaeil Heidari, Kevin G. Harding, and Robert W. Tait "Automated cylindrical mapper using chromatic confocal measurement", Proc. SPIE 8839, Dimensional Optical Metrology and Inspection for Practical Applications II, 88390F (20 September 2013); https://doi.org/10.1117/12.2023760

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KEYWORDS

Confocal microscopy

Surface finishing

Radium

Colorimetry

Sensors

Surface roughness

Edge roughness

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