Optical property of obliquely deposited dielectric films upon a metamaterial thin film

Yi-Jun Jen; Meng-Jie Lin; Jia-Wei Dai

doi:10.1117/12.2023988

19 September 2013 Optical property of obliquely deposited dielectric films upon a metamaterial thin film

Yi-Jun Jen, Meng-Jie Lin, Jia-Wei Dai

Proceedings Volume 8818, Nanostructured Thin Films VI; 88180T (2013) https://doi.org/10.1117/12.2023988
Event: SPIE NanoScience + Engineering, 2013, San Diego, California, United States

Abstract

The equivalent electromagnetic parameters of a three-layered system Air/ Ta₂O₅ NRA (165nm)/ SiO₂ NRA (133nm)/ Ag NRA(130nm) /BK7, fabricated by glancing angle deposition, are derived. The equivalent optical constants are used to estimate the optical performance that is achieved when additional films are deposited upon the NRA. First, the Ag NRA is deposited at a deposition angle of 89deg. An SiO₂ NRA is then deposited at a deposition angle of -89deg. Finally a Ta₂O₅ NRA is deposited upon the SiO₂ NRA at a deposition angle of 80deg. The reflectance and transmittance of the three-layered system Air/ Ta₂O₅ NRA (165nm)/ SiO₂ NRA (133nm)/ Ag NRA(130nm) /BK7 glass are measured and compared with the theoretically estimated reflectance. At a wavelength of 568nm, the theoretically estimated p-polarization reflectance is 21.75%, which is close to the measured reflectance of 20.3%. A suitable arrangement of dielectric thin films upon a metamaterial thin film is demonstrated to induce p-polarized transmission.

Citation Download Citation

Yi-Jun Jen, Meng-Jie Lin, and Jia-Wei Dai "Optical property of obliquely deposited dielectric films upon a metamaterial thin film", Proc. SPIE 8818, Nanostructured Thin Films VI, 88180T (19 September 2013); https://doi.org/10.1117/12.2023988

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