Paper
3 May 2013 Spectral filtering optimization of a measuring channel of an x-ray broadband spectrometer
B. Emprin, Ph. Troussel, B. Villette, F. Delmotte
Author Affiliations +
Abstract
A new channel of an X-ray broadband spectrometer has been developed for the 2 – 4 keV spectral range. It uses a spectral filtering by using a non-periodic multilayer mirror. This channel is composed by a filter, an aperiodic multilayer mirror and a detector. The design and realization of the optical coating mirror has been defined such as the reflectivity is above 8% in almost the entire bandwidth range 2 – 4 keV and lower than 2% outside. The mirror is optimized for working at 1.9° grazing incidence. The mirror is coated with a stack of 115 chromium / scandium (Cr / Sc) non-periodic layers, between 0.6 nm and 7.3 nm and a 3 nm thick top SiO2 layer to protect the stack from oxidization. To control thin thicknesses, we produced specific multilayer mirrors which consist on a superposition of two periodic Cr / Sc multilayers with the layer to calibrate in between. The mirror and subnanometric layers characterizations were made at the “Laboratoire Charles Fabry” (LCF) with a grazing incidence reflectometer working at 8.048 keV (Cu Kα radiation) and at the synchrotron radiation facility SOLEIL on the hard X-ray branch of the “Metrology” beamline. The reflectivity of the mirrors as a function of the photon energy was obtained in the Physikalisch Technische Bundesanstalt (PTB) laboratory at the synchrotron radiation facility Bessy II.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
B. Emprin, Ph. Troussel, B. Villette, and F. Delmotte "Spectral filtering optimization of a measuring channel of an x-ray broadband spectrometer", Proc. SPIE 8777, Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III, 87771B (3 May 2013); https://doi.org/10.1117/12.2016832
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KEYWORDS
Mirrors

Reflectivity

Chromium

Silica

Multilayers

X-rays

Silicon

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