From nature to MEMS: towards the detection-limit of crickets' hair sensors

A. M. K. Dagamseh

doi:10.1117/12.2017329

17 May 2013 From nature to MEMS: towards the detection-limit of crickets' hair sensors

A. M. K. Dagamseh

Proceedings Volume 8763, Smart Sensors, Actuators, and MEMS VI; 87632P (2013) https://doi.org/10.1117/12.2017329
Event: SPIE Microtechnologies, 2013, Grenoble, France

Abstract

Crickets use highly sensitive mechanoreceptor hairs to detect approaching spiders. The high sensitivity of these hairs enables perceiving tiny air-movements which are only just distinguishable from noise. This forms our source of inspiration to design sensitive arrays made of artificial hair sensors for flow pattern observation i.e. Flow camera. The realization of such high-sensitive hair sensor requires designs with low thermo-mechanical noise to match the detection-limit of crickets’ hairs. Here we investigate the damping factor in our artificial hair-sensor using different models as it is the source of the thermo-mechanical noise in MEMS structures. The results show that the damping factor estimated in air is in the range of 10^-12 N.m/rad.s^-1 which translates into a 52 μm/s threshold flow velocity.

Citation Download Citation

A. M. K. Dagamseh "From nature to MEMS: towards the detection-limit of crickets' hair sensors", Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 87632P (17 May 2013); https://doi.org/10.1117/12.2017329

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