Delay error and compensation in measurement of micro-scale using aiming and triggering method

Ji-wen Cui; Fu-ling Yang; Jiu-bin Tan

doi:10.1117/12.2014509

31 January 2013 Delay error and compensation in measurement of micro-scale using aiming and triggering method

Ji-wen Cui, Fu-ling Yang, Jiu-bin Tan

Proceedings Volume 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation; 87592L (2013) https://doi.org/10.1117/12.2014509
Event: International Symposium on Precision Engineering Measurement and Instrumentation 2012, 2012, Chengdu, China

Abstract

In order to improve accuracy of critical contacting position in measurement of micro-scale using aiming and triggering method, delay error of triggering signal, sampling delay error of sensor and length measuring device(double frequency laser interferometer) impact on accuracy are analyzed, compensation methods of solving nodal equation through establishing piecewise fitting function based on least square polynomial fitting and compute threshold triggering points through computing delay time are put forward. With this method, the measured diameter of micro-hole with nominal diameter Φ 0.3mm and depth 1.0mm is compensated. Results indicate that diameter of micro-hole after compensation increases 0.12 μm, closer to nominal value, and experimental standard deviation reduces by 0.069 μm. Therefore the measuring repeatability is improved, which demonstrates that the method is correct and effective.

Citation Download Citation

Ji-wen Cui, Fu-ling Yang, and Jiu-bin Tan "Delay error and compensation in measurement of micro-scale using aiming and triggering method", Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 87592L (31 January 2013); https://doi.org/10.1117/12.2014509

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