Laser pulse crystallization and optical properties of Si/SiO2 and Si/Si3N4 multilayer nano-heterostructures

V. A. Volodin; S. A. Arzhannikova; A. A. Gismatulin; G. N. Kamaev; A. Kh. Antonenko; S. G. Cherkova; A. G. Cherkov; S. A. Kochubei; A. A. Popov; S. Robert; H. Rinnert; M. Vergnat

doi:10.1117/12.2016834

3 January 2013 Laser pulse crystallization and optical properties of Si/SiO₂ and Si/Si₃N₄ multilayer nano-heterostructures

V. A. Volodin, S. A. Arzhannikova, A. A. Gismatulin, G. N. Kamaev, A. Kh. Antonenko, S. G. Cherkova, A. G. Cherkov, S. A. Kochubei, A. A. Popov, S. Robert, H. Rinnert, M. Vergnat

Author Affiliations +

Proceedings Volume 8700, International Conference Micro- and Nano-Electronics 2012; 870008 (2013) https://doi.org/10.1117/12.2016834
Event: International Conference on Micro-and Nano-Electronics 2012, 2012, Zvenlgorod, Russian Federation

Abstract

Furnace annealing, cw- and pulse laser treatments were applied for crystallization of amorphous Si nano-layers and Si nanoclusters in SiN_x-Si₃N₄ and Si-SiO₂ multilayer nanostructures. The as-deposited and annealed structures were studied using optical methods and electron microscopy techniques. The influence of hydrogen on crystallization and formation of Si nanoclusters was studied. Regimes for pulse laser crystallization of amorphous Si nanoclusters and nanolayers were found. This approach is applicable for the creation of dielectric films with semiconductor nanoclusters and silicon nanostructured films on non-refractory substrates for all-silicon tandem solar cells.

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V. A. Volodin, S. A. Arzhannikova, A. A. Gismatulin, G. N. Kamaev, A. Kh. Antonenko, S. G. Cherkova, A. G. Cherkov, S. A. Kochubei, A. A. Popov, S. Robert, H. Rinnert, and M. Vergnat "Laser pulse crystallization and optical properties of Si/SiO₂ and Si/Si₃N₄ multilayer nano-heterostructures", Proc. SPIE 8700, International Conference Micro- and Nano-Electronics 2012, 870008 (3 January 2013); https://doi.org/10.1117/12.2016834

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