Development of magneto-impedance microsensors for the detection of deep-lying defects using eddy current testing

Tao Peng; Johan Moulin; Yann Le Bihan; Francisco Alves

doi:10.1117/12.2009341

9 April 2013 Development of magneto-impedance microsensors for the detection of deep-lying defects using eddy current testing

Tao Peng, Johan Moulin, Yann Le Bihan, Francisco Alves

Author Affiliations +

Proceedings Volume 8691, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2013; 86910O (2013) https://doi.org/10.1117/12.2009341
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2013, San Diego, California, United States

Abstract

The detection of deep-lying small defects using eddy current non-destructive testing (NDT) involves high spatial resolution and AC field measurement capability. For this purpose multilayered Finemet^®/Copper/Finemet magneto-impedance microsensors were elaborated by microfabrication process. The films were deposited separately by sputtering using bi-layers lift-off method. A post-annealing step was achieved under magnetic field, which led to induce a transversal anisotropy in the magnetic films. A method based on double amplitude demodulation was proposed for the AC sensitivity characterization. A sensitivity of 2100 V/T/A has been measured and the sensors presented no hysteresis since a DC bias field larger than anisotropy field is applied. In addition, the sensors sensitivity remains constant up to 1 kHz.

Citation Download Citation

Tao Peng, Johan Moulin, Yann Le Bihan, and Francisco Alves "Development of magneto-impedance microsensors for the detection of deep-lying defects using eddy current testing", Proc. SPIE 8691, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2013, 86910O (9 April 2013); https://doi.org/10.1117/12.2009341

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