SRAM circuit performance in the presence of process variability of self-aligned multiple patterning

Wei Xiao; Qi Cheng; Yijian Chen

doi:10.1117/12.2011686

29 March 2013 SRAM circuit performance in the presence of process variability of self-aligned multiple patterning

Wei Xiao, Qi Cheng, Yijian Chen

Proceedings Volume 8684, Design for Manufacturability through Design-Process Integration VII; 86840K (2013) https://doi.org/10.1117/12.2011686
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

The impacts of self-aligned triple patterning (SATP) and self-aligned quadruple patterning (SAQP) process variability on SRAM circuit performance are studied in this paper. Different types of SRAM circuit variability such as intra-cell and inter-cell variability are discussed. Spatially periodic variation patterns of a SRAM array fabricated with SATP process is identified, while spatial variation of SAQP based SRAM array is found to be less significant. Statistical TCAD simulations are carried out to examine the process variability induced fluctuation of SRAM circuit performance. It is found that SRAM static noise margin (SNM) shrinks with increased variations in line-width roughness and CD, especially when the technology node is scaled down. Despite the SATP/SAQP process variability and the related SNM reduction, our simulations show that the induced fluctuation of SRAM circuits is still manageable. It is also confirmed that circuit stability and manufacturing yield of SAQP based SRAM are better than SATP based SRAM.

Citation Download Citation

Wei Xiao, Qi Cheng, and Yijian Chen "SRAM circuit performance in the presence of process variability of self-aligned multiple patterning", Proc. SPIE 8684, Design for Manufacturability through Design-Process Integration VII, 86840K (29 March 2013); https://doi.org/10.1117/12.2011686

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available