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23 April 2013 Front Matter: Volume 8684
Proceedings Volume 8684, Design for Manufacturability through Design-Process Integration VII; 868401 (2013) https://doi.org/10.1117/12.2028890
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States
Abstract
This PDF file contains the front matter associated with SPIE Proceedings Volume 8684, including the Title Page, Copyright Information, Table of Contents, Introduction and Conference Committee listing.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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"Front Matter: Volume 8684", Proc. SPIE 8684, Design for Manufacturability through Design-Process Integration VII, 868401 (23 April 2013); https://doi.org/10.1117/12.2028890
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KEYWORDS
Visualization
Design for manufacturing
Design for manufacturability
Double patterning technology
Optical lithography
Lithography
Semiconductors
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