Analytical equation predicting the forbidden pattern pitch for phase-shifting mask

Junichi Tamaki; Masato Shibuya; Nakadate Suezou

doi:10.1117/12.2010770

12 April 2013 Analytical equation predicting the forbidden pattern pitch for phase-shifting mask

Junichi Tamaki, Masato Shibuya, Nakadate Suezou

Proceedings Volume 8683, Optical Microlithography XXVI; 86832A (2013) https://doi.org/10.1117/12.2010770
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

In order to produce various kind of circuit pattern in short-term cycle, mask-less exposure using DMD(digital mirror device)-mask is useful. Although not only fine resolution but also large DOF(depth of focus) can be obtained by using PSM(phase shifting mask), there exists forbidden pitch region for PSM. While the pattern pitch of PSM becomes fine, it cannot be resolved at a certain pitch and it will be resolved again at a finer pattern pitch. This un-resolvable region is called forbidden pitch region. It has been time consuming to predict this region by numerical calculation. Applying PSM to various fields, we should predict the region simply. In this paper, we derive analytical equations which give the optimal NA(Numerical Aperture) and finest resolution and also reveal forbidden region. In addition, we confirm the validity of analytical equation by numerical calculation using PROLITH^TM. This result will be useful to apply PSM in practice.

Citation Download Citation

Junichi Tamaki, Masato Shibuya, and Nakadate Suezou "Analytical equation predicting the forbidden pattern pitch for phase-shifting mask", Proc. SPIE 8683, Optical Microlithography XXVI, 86832A (12 April 2013); https://doi.org/10.1117/12.2010770

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available