A study of vertical lithography for high-density 3D structures

Masaki Mizutani; Shin-Ichiro Hirai; Ichiro Koizumi; Ken-Ichiro Mori; Seiya Miura

doi:10.1117/12.2011340

12 April 2013 A study of vertical lithography for high-density 3D structures

Masaki Mizutani, Shin-Ichiro Hirai, Ichiro Koizumi, Ken-Ichiro Mori, Seiya Miura

Proceedings Volume 8683, Optical Microlithography XXVI; 86831F (2013) https://doi.org/10.1117/12.2011340
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

In recent years, demand for high-density integration of semiconductor chips has steadily increased due to miniaturization and high-performance requirements of electronics including Smartphones and Tablet PCs. In addition to 3D integration using Through-Silicon Via (TSV) technology, 2.5D integration technology using silicon interposers has also become a hot topic. Canon has identified key challenges that must be solved for successful implementation of high-density integration technologies into mass production and to meet these challenges, Canon developed the FPA-5510iV i-line lithography tool (stepper) that is now in wide use at customer sites for their most challenging processes. In this paper, Canon will explain details of FPA-5510iV features that support high-density integration. Canon will also introduce additional challenges that must be solved to ensure the success of high-density integration technologies in mass production, as well as Canon efforts to solve the remaining challenges.

Citation Download Citation

Masaki Mizutani, Shin-Ichiro Hirai, Ichiro Koizumi, Ken-Ichiro Mori, and Seiya Miura "A study of vertical lithography for high-density 3D structures", Proc. SPIE 8683, Optical Microlithography XXVI, 86831F (12 April 2013); https://doi.org/10.1117/12.2011340

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available