Grayscale lithography: 3D structuring and thickness control

Marcel Heller; Dieter Kaiser; Maik Stegemann; Georg Holfeld; Nicoló Morgana; Jens Schneider; Daniel Sarlette

doi:10.1117/12.2008847

12 April 2013 Grayscale lithography: 3D structuring and thickness control

Marcel Heller, Dieter Kaiser, Maik Stegemann, Georg Holfeld, Nicoló Morgana, Jens Schneider, Daniel Sarlette

Proceedings Volume 8683, Optical Microlithography XXVI; 868310 (2013) https://doi.org/10.1117/12.2008847
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

Grayscale lithography has become a common technique for three dimensional structuring of substrates. In order to make the process useful for manufacturing of semiconductor and in particular optoelectronic devices, high reproducible and uniform final film thicknesses are required. Simulations based on a calibrated resist model are used to predict customized process parameters from pixel layout to 3d substrate patterning. Multiple, arbitrary resist heights are reached by using i-line lithography. Scalable and uniform transfer of discrete step heights into oxide are realized by multiple alternating high selective resist and oxide (MASO) etch. Requirements and limitations of reliable 3D film thickness and uniformity control within a CMOS fabrication environment are being discussed.

Citation Download Citation

Marcel Heller, Dieter Kaiser, Maik Stegemann, Georg Holfeld, Nicoló Morgana, Jens Schneider, and Daniel Sarlette "Grayscale lithography: 3D structuring and thickness control", Proc. SPIE 8683, Optical Microlithography XXVI, 868310 (12 April 2013); https://doi.org/10.1117/12.2008847

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available