Light scattering by organic crosslinking material using nanomorphology of polymer blends

Satoshi Takei; Naoya Kubo; Takumi Ichikawa; Kazuki Maekawa; Yoshiyuki Yokoyama

doi:10.1117/12.2010646

29 March 2013 Light scattering by organic crosslinking material using nanomorphology of polymer blends

Satoshi Takei, Naoya Kubo, Takumi Ichikawa, Kazuki Maekawa, Yoshiyuki Yokoyama

Proceedings Volume 8682, Advances in Resist Materials and Processing Technology XXX; 86821M (2013) https://doi.org/10.1117/12.2010646
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

This study reports a progress to create the regularly-structured circle using nanomorphology by the nanoparticle free polymer blends. The developed light scattering organic crosslinking material containing no particles, indicated excellent light scattering rates of more than 6.0 % at 300-400 nm wavelength, a sufficient thermal stability up to 170 °C, and better O₂ gas barrier properties than that of polyethylene. This desirable concept using nanomorphology of polymer blends in light scattering film is expected to be effective in promoting the future production of next generation electronic devices.

Citation Download Citation

Satoshi Takei, Naoya Kubo, Takumi Ichikawa, Kazuki Maekawa, and Yoshiyuki Yokoyama "Light scattering by organic crosslinking material using nanomorphology of polymer blends", Proc. SPIE 8682, Advances in Resist Materials and Processing Technology XXX, 86821M (29 March 2013); https://doi.org/10.1117/12.2010646

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