High-speed atomic force microscopy for patterned defect review

Jason Osborne; Shuiqing Hu; Haiming Wang; Yan Hu; Jian Shi; Sean Hand; Chanmin Su

doi:10.1117/12.2011665

18 April 2013 High-speed atomic force microscopy for patterned defect review

Jason Osborne, Shuiqing Hu, Haiming Wang, Yan Hu, Jian Shi, Sean Hand, Chanmin Su

Proceedings Volume 8681, Metrology, Inspection, and Process Control for Microlithography XXVII; 86813C (2013) https://doi.org/10.1117/12.2011665
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

This paper reports recent progress in using Atomic Force Microscopy as a defect review tool for patterned wafers. The key developments in the AFM technology are substantial scan speed improvements and the ability to reach feature bottom-CDs in a narrow trench. The latter is accomplished by controlling the tip-sample interaction via the short-range interaction force. Narrow trenches with vertical side wall angles comparable to current FinFET dimensions were imaged using the AFM, where imaging speeds for this sample reached about 0.2 frames per second, providing quantified topographic data for key features of the trenches. The sub-10 nm resolution data of high speed AFM demonstrates the technology as a viable solution for defect review.

Citation Download Citation

Jason Osborne, Shuiqing Hu, Haiming Wang, Yan Hu, Jian Shi, Sean Hand, and Chanmin Su "High-speed atomic force microscopy for patterned defect review", Proc. SPIE 8681, Metrology, Inspection, and Process Control for Microlithography XXVII, 86813C (18 April 2013); https://doi.org/10.1117/12.2011665

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available